{"id":67011,"date":"2025-10-18T11:25:00","date_gmt":"2025-10-18T03:25:00","guid":{"rendered":"https:\/\/www.url.com.tw\/blog\/?p=67011"},"modified":"2025-10-14T11:31:17","modified_gmt":"2025-10-14T03:31:17","slug":"%e5%8f%b0%e7%81%a3%e5%9c%a8euv%e8%a3%bd%e7%a8%8b%e7%9a%84%e7%89%b9%e7%94%a8%e5%8c%96%e5%ad%b8%e6%93%ba%e8%84%ab%e7%be%8e%e5%9c%8b%e6%8a%80%e8%a1%93%e6%9c%89%e5%a4%9a%e9%9b%a3","status":"publish","type":"post","link":"https:\/\/www.url.com.tw\/blog\/?p=67011","title":{"rendered":"\u53f0\u7063\u5728EUV\u88fd\u7a0b\u7684\u7279\u7528\u5316\u5b78\u64fa\u812b\u7f8e\u570b\u6280\u8853\u6709\u591a\u96e3"},"content":{"rendered":"\n

\u6587\uff0e\u6d2a\u5bf6\u5c71<\/p>\n\n\n\n

\u8f1d\u9054\u7684\u5317\u58eb\u79d1\u7e3d\u90e8\u96e3\u7522\u4e00\u4e8b\uff0c\u65b0\u58fd\u8207\u8f1d\u9054\u5c6c\u610f\u7684\u300c\u6700\u4f73\u65b9\u6848\u300d\uff0c\u5c31\u662f\u65b0\u58fd\u5c07T17<\/strong>\u3001T18<\/strong>\u5730\u4e0a\u6b0a\u76f4\u63a5\u79fb\u8f49\u7d66\u8f1d\u9054\uff0c\u537b\u56e0\u5317\u5e02\u5e9c\u6182\u5fc3\u6709\u5716\u5229\u8ca1\u5718\u7591\u616e\uff0c\u4e00\u76f4\u672a\u80fd\u9ede\u982d\u540c\u610f\u3002\u6240\u4ee5\u5c31\u5546\u696d\u8cb7\u8ce3\u7684\u89d2\u5ea6\uff0c\u8f1d\u9054\u662f\u9858\u610f\u51fa\u50f9\u8cb7\uff0c\u65b0\u58fd\u4e5f\u8b1b\u597d\u50f9\u683c\u9858\u610f\u8ce3\uff0c\u800c\u5317\u5e02\u5e9c\u770b\u5230\u67ef\u6587\u54f2\u6557\u9078\u5f8c\u7684\u4e0b\u5834\uff0c\u9632\u5f0a\u512a\u5148\uff0c\u4e5f\u53ef\u4ee5\u7406\u89e3\uff0c\u4e2d\u592e\u4e0d\u8868\u614b\uff0c\u7acb\u5834\u66d6\u6627\uff0c\u56e0\u6b64\u8f1d\u9054\u7e3d\u90e8\u53ef\u80fd\u843d\u5f97\u5927\u5bb6\u4e00\u8d77\u8f38\u7684\u4e0b\u5834\u3002<\/strong><\/p>\n\n\n\n

\u8981\u9760\u53f0\u7063\u4f9b\u61c9\u93c8\u5171\u540c\u6210\u5927\u4e8b <\/strong>\u6709\u9322\u597d\u8fa6\u4e8b<\/strong><\/p>\n\n\n\n

\u5982\u4f55\u4fc3\u6210\u9019\u6a01\u8cb7\u8ce3\uff0c\u53c8\u4e0d\u843d\u5165\u5716\u5229\u8ca1\u5718\u7684\u53e3\u5be6\uff0c\u7b46\u8005\u62cb\u78da\u5f15\u7389\uff0c\u89e3\u65b9\u5c31\u5728\u5ddd\u666e\u7684\u842c\u4e8b\u90fd\u53ef\u4ea4\u6613\uff0c\u5373\u8f1d\u9054\u52a0\u78bc\u6350\u8d08\u5e02\u5e9c(\u975eT17\u3001T18\u4e0d\u8981\u7684\u6307\u5b9a\u8cbb)\u3001\u65b0\u58fd\u5c11\u8cfa\u9ede\u3001\u5317\u5e02\u5e9c\u591a\u8cfa\u9ede\u5145\u5be6\u8ca1\u5eab\uff0c\u8070\u660e\u7684\u8a71\uff0c\u518d\u5f9e\u9019\u7b46\u9322\u64a5\u4e00\u4e9b\u767c\u7d66\u5e02\u6c11\u5835\u53e3\u5be6\uff0c\u9019\u6a23\u653f\u6575\u4e5f\u96e3\u7528\u5716\u5229\u8ca1\u5718\u7684\u7f6a\u540d\u627e\u9ebb\u7169\u3002\u8a18\u8457\uff0c\u8f1d\u9054\u6709\u7684\u662f\u9322\uff0c\u800c\u4e14\u8981\u9760\u53f0\u7063\u4f9b\u61c9\u93c8\u5171\u540c\u6210\u5927\u4e8b\uff0c\u8f1d\u9054\u80fd\u63a5\u53d7\u53f0\u7a4d\u96fb\u6f32\u50f9\uff0c\u4e5f\u63a5\u53d7\u4e86\u5ddd\u666e\u5c0dH20\u92b7\u552e\u4e2d\u570b\u62bd\u6210\u7684\u653f\u7b56\uff0c\u60f3\u5fc5\u80fd\u82b1\u9322\u64fa\u5e73\u5317\u58eb\u79d1\u7e3d\u90e8\u7684\u9ebb\u7169\uff0c\u8f1d\u9054\u61c9\u8a72\u6709\u5fc3\u7406\u6e96\u5099\u3002<\/p>\n\n\n\n

\u81f3\u65bc\u65b0\u5149\u4eba\u58fd\uff0c\u4f4e\u50f9\u6a19\u4e86\u6848\u9072\u9072\u4e0d\u958b\u767c\uff0c\u64fa\u660e\u4e86\u990a\u5730\uff0c\u5c07\u4f86\u5728\u985e\u4f3c\u7684BOT\u6a19\u6848\u4e0a\uff0c\u653f\u5e9c\u90e8\u9580\u4e00\u5b9a\u8981\u7acb\u4e0b\u9738\u738b\u689d\u6b3e\u2500\u9ec3\u91d1\u7968\u56de\u6536\u6b0a\uff0c\u8fd4\u9084\u7d66\u8ca1\u5718\u7684\u91d1\u984d\u5c31\u662f\u8ca1\u5718\u5df2\u7d93\u51fa\u8cc7\u7684\u91d1\u984d\uff0b\u5229\u606f\uff0c\u62dc\u8a17\uff0c\u6c92\u767c\u751f\u7684\u672a\u4f86\u4e94\u5341\u5e74\u6536\u76ca\u4e5f\u6562\u7b97\u5728\u5e02\u6c11\u982d\u4e0a\uff0c\u53c8\u4e0d\u662f\u9ad8\u5229\u8cb8\u8a0e\u50b5\u96c6\u5718\uff0c\u91d1\u878d\u7279\u8a31\u884c\u696d\u7684\u4f01\u696d\u793e\u6703\u8cac\u4efb(CRS)\u90fd\u7576\u8033\u908a\u98a8\uff0c\u7576\u521d\u91d1\u7ba1\u6703\u5c31\u4e0d\u8a72\u901a\u904e\u53f0\u65b0\u91d1\u3001\u65b0\u5149\u91d1\u5408\u4f75\u6848\u3002<\/p>\n\n\n\n

\u5949\u52f8\u8523\u5e02\u9577\u4e00\u53e5\uff0c\u64cb\u4eba\u5bb6\u7684\u8ca1\u8def\u4e5f\u96e3\u767b\u5927\u4f4d\uff0c\u5927\u5bb6\u9858\u610f\u8ddf\u8457\u4f60\u6df7\uff0c\u4e0d\u5c31\u662f\u5e0c\u671b\u65e5\u5b50\u8d8a\u6df7\u8d8a\u597d\uff0c\u6709\u672c\u4e8b\uff0c\u61c9\u8a72\u60f3\u8fa6\u6cd5\u628a\u9905\u505a\u5927\uff0c\u8b93\u5927\u5bb6\u90fd\u6cbe\u5149\uff0c\u5fc3\u6b63\u4e0d\u6015\u5f71\u5b50\u659c\uff0c\u9632\u5f0a\u904e\u982d\u5c31\u5e79\u4e0d\u4e86\u5927\u4e8b\u3002\u4e2d\u592e\u4e5f\u8981\u8868\u500b\u614b\uff0c\u60e6\u60e6\u5730\u7b49\u6293\u5c0f\u8fae\u5b50\uff0c\u5f04\u4e1f\u4e86\u8f1d\u9054\u4e9e\u592a\u7e3d\u90e8\u4e00\u6a23\u4e1f\u81c9\u3002<\/p>\n\n\n\n

\u5148\u62cb\u300c\u53f0\u7063\u5730\u4f4d\u672a\u5b9a\u8ad6\u300d <\/strong>\u518d\u63d0\u300c\u6676\u7247\u4e94\u4e94\u5206\u300d<\/strong><\/p>\n\n\n\n

\u63db\u500b\u8a71\u984c\uff0c\u7f8e\u570b\u5546\u52d9\u90e8\u9577\u76e7\u7279\u5c3c\u514b\u63d0\u51fa\u53f0\u7063\u6676\u7247\u88fd\u9020\u8207\u7f8e\u570b\u300c\u4e94\u4e94\u5206\u300d\u8aaa\u6cd5\uff0c\u7b46\u8005\u8a8d\u70ba\u53f0\u7a4d\u96fb\u5df2\u7d93\u8d74\u7f8e\u6295\u8cc7\u8a2d\u5ee0\u4e86\uff0c\u300c\u4e94\u4e94\u5206\u300d\u662f\u9072\u65e9\u7684\u4e8b\u60c5\uff0c\u4e0d\u5982\u5c31\u505a\u4e00\u6a01\u5927\u8cb7\u8ce3\uff0c\u6eff\u8db3\u53f0\u7f8e\u96d9\u65b9\u7684\u671f\u5f85\u3002<\/p>\n\n\n\n

\u53f0\u7063\u8981\u4ec0\u9ebc\uff1f\u7576\u7136\u662f\u8b93\u570b\u969b\u627f\u8a8d\u4e2d\u83ef\u6c11\u570b\u7684\u4e3b\u6b0a\u5730\u4f4d\uff0c\u7f8e\u570b\u63a5\u53d7\u9019\u6a01\u4ea4\u6613\u4e86\u55ce\uff1fAIT\u7a81\u7136\u62cb\u51fa\u300c\u53f0\u7063\u5730\u4f4d\u672a\u5b9a\u8ad6\u300d\uff0c\u63a5\u8457\u300c\u6676\u7247\u4e94\u4e94\u5206\u300d\u4e4b\u8aaa\uff0c\u986f\u7136\u5169\u8005\u4e4b\u9593\u6709\u8457\u4e00\u5b9a\u7684\u95dc\u806f\uff0c\u7136\u5f8c\u62c9\u7f8e\u8207\u52a0\u6d77\u4e03\u53cb\u90a6\u7a81\u7136\u4e3b\u52d5\u516c\u958b\u8868\u9054\u5805\u5b9a\u7dad\u7e6b\u8207\u4e2d\u83ef\u6c11\u570b\u53f0\u7063\u90a6\u8abc\uff0c\u8ab0\u90fd\u77e5\u9053\u62c9\u7f8e\u8ddf\u52a0\u6d77\u90fd\u662f\u7f8e\u570b\u7684\u5f8c\u82b1\u5712\uff0c\u4e03\u53cb\u90a6\u9019\u9ebc\u6709\u9ed8\u5951\u8868\u614b\uff0c\u53ef\u610f\u6703\u4e0d\u53ef\u8a00\u8a9e\u3002<\/p>\n\n\n\n

\u65e2\u7136\u5df2\u7d93\u6709\u4e86\u9ed8\u5951\uff0c\u90a3\u9ebc\u4e0d\u59a8\u66f4\u5927\u81bd\u4e00\u9ede\uff0c\u7f8e\u570b\u60f3\u8981\u300c\u4e94\u4e94\u5206\u300d\u5148\u9032\u6676\u7247\uff0c\u7f8e\u570b\u5c31\u5f97\u8ddf\u4e2d\u83ef\u6c11\u570b\u5efa\u4ea4\uff0c\u9322\u8cb7\u4e0d\u5230\u7684\u6771\u897f\u624d\u6709\u50f9\u503c\u3002\u53f0\u7a4d\u96fb\u8981\u5b8c\u5168\u6280\u8853\u81ea\u4e3b\uff0c\u7b49\u65bc\u8981\u5728\u8a2d\u5099\u3001EDA\u3001\u6750\u6599\u3001IP\u56db\u5927\u9818\u57df\u5efa\u7acb\u5b8c\u6574\u81ea\u4e3b\u751f\u614b\uff0c\u5305\u542bEUV\u3001EDA\u5168\u93c8\u81ea\u4e3b\uff0c\u81f3\u5c11\u9700\u8981\u4e00\u4e16\u4ee3\u4ee5\u4e0a\u7684\u6642\u9593\uff0c\u4e26\u4e14\u8981\u6295\u5165\u6578\u5343\u5104\u7f8e\u5143\u898f\u6a21\u7684\u570b\u5bb6\u8a08\u756b\u3002<\/p>\n\n\n\n

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\u53f0\u7a4d\u96fbN7\u3001N5\u521d\u671f\u4ecd\u63a1ArF Immersion\uff0b\u675c\u90a6\u5149\u963b\u914d\u65b9\u3002EUV\u88fd\u7a0b\u5728N5\u4ee5\u4e0b\u90e8\u5206\u5c64\u7d1a\u6df7\u7528\u675c\u90a6\u8207\u65e5\u672cJSR\u7684\u5171\u914d\u65b9\u3002\u675c\u90a6\u9664\u5149\u963b\u5916\uff0c\u4e5f\u662f\u5168\u7403\u6700\u5927CMP slurry(\u5316\u5b78\u6a5f\u68b0\u7814\u78e8\u6db2)\u4f9b\u61c9\u5546\u4e4b\u4e00\u3002\u53f0\u7a4d\u96fb\u5728\u9285\u91d1\u5c6c\u5c64\u88fd\u7a0b\u4e2d\u4f7f\u7528\u675c\u90a6\u7684\u4ecb\u9762\u7814\u78e8\u6db2\u3001\u9285\u5c64\u62cb\u5149\u6db2\u3001\u7d55\u7de3\u5c64\u7814\u78e8\u6db2\u3002<\/p>\n\n\n\n

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Entegris\u70ba\u5168\u7403\u6700\u5927\u534a\u5c0e\u9ad4\u5316\u5b78\u54c1\u7d14\u5316\u3001\u904b\u8f38\u8207\u904e\u6ffe\u7cfb\u7d71\u4f9b\u61c9\u5546\uff0c\u63d0\u4f9b\u9ad8\u7d14\u5ea6\u5316\u5b78\u54c1\u5bb9\u5668\u3001\u6c23\u9ad4\u8207\u6db2\u9ad4\u904e\u6ffe\u7cfb\u7d71\u3001\u5149\u963b\u6db2\u7d14\u5316\u8207\u4f9b\u61c9\u6a21\u7d44\uff0c\u9019\u4e9b\u90fd\u662f\u5149\u963b\u8207\u8755\u523b\u5316\u5b78\u54c1\u9032\u5165\u7121\u5875\u5ba4\u4e4b\u524d\u7684\u95dc\u9375\u74b0\u7bc0\u3002\u5e7e\u4e4e\u6240\u6709\u5148\u9032\u88fd\u7a0b\u7bc0\u9ede\u7686\u4f7f\u7528Entegris\u7684\u4f9b\u61c9\u6a21\u7d44\u3002Entegris\u5728\u5ee0\u5167\u5316\u5b78\u54c1\u5faa\u74b0\u7cfb\u7d71\uff0c\u7279\u5225\u662fEUV\u5ee0\u623f\u7684\u6c23\u9ad4\u7ba1\u7406\u6a21\u7d44\u4e5f\u4f9b\u61c9\u9ad8\u7d14\u5ea6\u9178\u9e7c\u6db2\u904e\u6ffe\u7cfb\u7d71\u3001\u6c23\u9ad4\u7d14\u5316\u7cfb\u7d71\u3001CMP\u5ee2\u6db2\u56de\u6536\u8207\u518d\u751f\u7cfb\u7d71\u3002<\/p>\n\n\n\n

CMC Materials\u4f9b\u61c9\u53f0\u7a4d\u96fb\u5316\u5b78\u6a5f\u68b0\u7814\u78e8\u6db2\u8207\u62cb\u5149\u588a\uff0c\u5728N7\u3001N5\u3001N3\u88fd\u7a0b\u7528\u65bc\u91d1\u5c6c\u5c64(Cu\/Ta\/TiN)\u8207\u7d55\u7de3\u5c64\u9593\u7684\u7cbe\u5bc6\u7814\u78e8\u3002<\/p>\n\n\n\n

\u7f8e\u5546\u95dc\u9375\u5316\u5b78\u54c1 <\/strong>\u54ea\u4e9b\u6709\u6a5f\u6703\u66ff\u63db\u6210\u53f0\u7063\u570b\u7522<\/strong><\/p>\n\n\n\n

\u54ea\u4e9b\u7f8e\u5546\u95dc\u9375\u5316\u5b78\u54c1\uff0c\u53f0\u7063\u6709\u6a5f\u6703\u570b\u7522\u66ff\u4ee3\uff1fArF\/KrF\u5149\u963b\uff0c\u53f0\u7063\u4e2d\u6cb9\u3001\u53f0\u5316\u3001\u9577\u6625\u3001\u6c38\u5149\u90fd\u6709\u5728\u7814\u767c\u5149\u963b\u6a39\u8102\u8207\u55ae\u9ad4\u914d\u65b9\uff0c\u4e94\u81f3\u516b\u5e74\u53ef\u90e8\u5206\u53d6\u4ee3\uff0c\u4f46\u7cbe\u7d14\u5ea6\u8207\u5206\u5b50\u91cf\u63a7\u5236\u4ecd\u843d\u5f8c\u4e00\u4ee3\u3002EUV\u5149\u963b\u6d89\u53ca\u6975\u8907\u96dc\u9ad8\u5206\u5b50\u8a2d\u8a08\u8207\u96fb\u5b50\u675f\u654f\u611f\u53cd\u61c9\uff0c\u53f0\u7063\u76ee\u524d\u7121\u6b64\u91cf\u7522\u6280\u8853\uff0c\u5341\u81f3\u5341\u4e94\u5e74\u5e7e\u4e4e\u4e0d\u53ef\u80fd\u3002<\/p>\n\n\n\n

\u4e2d\u83ef\u5316\u3001\u6c38\u5149\u3001\u9577\u6625\u6210\u529f\u91cf\u7522\u9ad8\u7d14\u5ea6TMAH\u986f\u5f71\u6db2\u8207\u6eb6\u5291\u7d1aIPA\uff0c\u986f\u5f71\u6db2\u8207\u525d\u96e2\u6db2\u53ef\u53d6\u4ee380%\u3002\u4f73\u80fd\u5316\u5b78\u3001\u52dd\u4e00\u3001\u4fe1\u660c\u5316\u5b78\u5177\u5099\u8755\u523b\u6db2\u81ea\u88fd\u80fd\u529b\uff0c\u4f46\u5728\u8755\u523b\u901f\u7387\u63a7\u5236\u4e0a\u4ecd\u843d\u5f8c\uff0c\u53ef\u53d6\u4ee3 60-70%\u3002<\/p>\n\n\n\n

\u52dd\u4e00\u5316\u5de5\u8207\u5de5\u7814\u9662\u5408\u4f5c\u767c\u5c55\u8d85\u7d14\u5316\u5b78\u56de\u6536\u6280\u8853\uff0c\u6e05\u6d17\u6db2\u8207\u8d85\u7d14\u5316\u5b78\u54c1\u53ef\u5408\u4f5c\u66ff\u4ee3\uff0c\u6709\u6a5f\u6703\u81ea\u7d66\u3002\u52dd\u4e00\u3001\u4e09\u798f\u5316\u3001\u6c38\u5149\u7b49\u5ee0\u5177\u5099\u6c27\u5316\u5c64\u7814\u78e8\u6db2\u57fa\u790e\u914d\u65b9\u80fd\u529b\uff0c\u9285\u5c64\u7814\u78e8\u6db2\u53ef\u66ff\u4ee330%\uff0c\u6838\u5fc3\u5728\u65bc\u5fae\u7c92\u5206\u5e03\u8207\u8868\u9762\u6d3b\u6027\u5291\u63a7\u5236\uff0c\u53f0\u7063\u4ecd\u9700\u6280\u8f49\u6216\u5408\u8cc7\u3002<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

\u6295\u5165\u5341\u5e74  <\/strong>\u53ef\u671b\u9054\u4e94\u6210\u95dc\u9375\u5316\u5b78\u54c1\u81ea\u4e3b\u5316<\/strong><\/p>\n\n\n\n

\u7814\u78e8\u588a\u53ef\u66ff\u4ee350%\uff0c\u5df2\u6709\u65ed\u7136\u3001\u4e0a\u8a6e\u7b49\u5ee0\u7814\u767c\u805a\u6c28\u916f\u6750\u8cea\u66ff\u4ee3\u3002\u96c6\u4e2d\u706b\u529b\u767c\u5c55CMP slurry\u570b\u7522\u54c1\u724c\uff0c\u521d\u671f\u4ee5\u300c\u6210\u719f\u88fd\u7a0b\u300d\u70ba\u5207\u5165\u9ede\uff0c\u9577\u671f\u671d7nm\u4ee5\u4e0b\u5c08\u7528slurry\u524d\u9032\u3002<\/p>\n\n\n\n

Entegris\u58df\u65b7\u9ad8\u7d14\u5ea6\u6ffe\u82af\u8207\u5bb9\u5668\uff0c\u83ef\u7acb\u3001\u529b\u9e97\u5316\u5b78\u80fd\u751f\u7522\u90e8\u5206\u6ffe\u82af\uff0c\u4f46\u7d14\u5ea6\u7a69\u5b9a\u6027\u4e0d\u8db3\uff0c20-30%\u570b\u7522\u66ff\u4ee3\u3002\u6c23\u9ad4\u7d14\u5316\u6a21\u7d44\u77ed\u671f\u7121\u6cd5\u66ff\u4ee3\uff0c\u542b\u9ad8\u7cbe\u5bc6\u95a5\u9ad4\u8207\u819c\u6280\u8853\uff0c\u9700\u9577\u671f\u6750\u6599\u79d1\u5b78\u7a81\u7834\u3002 <\/p>\n\n\n\n

\u53f0\u7063\u8981\u64fa\u812b\u7f8e\u5546\u5316\u5b78\u54c1\u4f9d\u8cf4\uff0c\u77ed\u671f\u53ef\u81ea\u7d66\u7684\u662f\u300c\u5316\u5b78\u6eb6\u5291\u300d\u8207\u300c\u7814\u78e8\u6db2\u300d\uff1b\u4e2d\u671f\u53ef\u653b\u7684\u6230\u5834\u662f\u300cArF\u5149\u963b\u300d\uff1b\u9577\u671f\u96e3\u5543\u7684\u9aa8\u982d\u662f\u300cEUV\u5149\u963b\u300d\u8207\u300c\u7d14\u5316\u6a21\u7d44\u300d\u3002\u82e5\u653f\u5e9c\u8207\u7522\u696d\u806f\u624b\u6295\u5165\u5341\u5e74\uff0c\u53f0\u7063\u6709\u6a5f\u6703\u57282035\u5e74\u524d\u9054\u621050%\u4ee5\u4e0a\u95dc\u9375\u5316\u5b78\u54c1\u81ea\u4e3b\u5316\u3002<\/p>\n\n\n\n

<\/p>\n","protected":false},"excerpt":{"rendered":"<\/p>\n

\u6587\uff0e\u6d2a\u5bf6\u5c71<\/p>\n<\/p>\n

\u8f1d\u9054\u7684\u5317\u58eb\u79d1\u7e3d\u90e8\u96e3\u7522\u4e00\u4e8b\uff0c\u65b0\u58fd\u8207\u8f1d\u9054\u5c6c\u610f\u7684\u300c\u6700\u4f73\u65b9\u6848\u300d\uff0c\u5c31\u662f\u65b0\u58fd\u5c07T17<\/strong>\u3001T18<\/strong>\u5730\u4e0a\u6b0a\u76f4\u63a5\u79fb\u8f49\u7d66\u8f1d\u9054\uff0c\u537b\u56e0\u5317\u5e02\u5e9c\u6182\u5fc3\u6709\u5716\u5229\u8ca1\u5718\u7591\u616e\uff0c\u4e00\u76f4\u672a\u80fd\u9ede\u982d\u540c\u610f\u3002\u6240\u4ee5\u5c31\u5546\u696d\u8cb7\u8ce3\u7684\u89d2\u5ea6\uff0c\u8f1d\u9054\u662f\u9858\u610f\u51fa\u50f9\u8cb7\uff0c\u65b0\u58fd\u4e5f\u8b1b\u597d\u50f9\u683c\u9858\u610f\u8ce3\uff0c\u800c\u5317\u5e02\u5e9c\u770b\u5230\u67ef\u6587\u54f2\u6557\u9078\u5f8c\u7684\u4e0b\u5834\uff0c\u9632\u5f0a\u512a\u5148\uff0c\u4e5f\u53ef\u4ee5\u7406\u89e3\uff0c\u4e2d\u592e\u4e0d\u8868\u614b\uff0c \u2026\u7e7c\u7e8c\u95b1\u8b80<\/a><\/span><\/strong><\/p>\n

<\/div>\n","protected":false},"author":14,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[2097],"tags":[18453],"_links":{"self":[{"href":"https:\/\/www.url.com.tw\/blog\/index.php?rest_route=\/wp\/v2\/posts\/67011"}],"collection":[{"href":"https:\/\/www.url.com.tw\/blog\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.url.com.tw\/blog\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.url.com.tw\/blog\/index.php?rest_route=\/wp\/v2\/users\/14"}],"replies":[{"embeddable":true,"href":"https:\/\/www.url.com.tw\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=67011"}],"version-history":[{"count":0,"href":"https:\/\/www.url.com.tw\/blog\/index.php?rest_route=\/wp\/v2\/posts\/67011\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.url.com.tw\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=67011"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.url.com.tw\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=67011"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.url.com.tw\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=67011"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}